Transparent Conductive Ga-Al-ZnO Film Fabricated by Facing Targets Sputtering System

2:30 PM - 5:00 PM

[FMCp5-6L] Transparent Conductive Ga-Al-ZnO Film Fabricated by Facing Targets Sputtering System

*Kyung Hwan Kim¹, Yu Jin Kim¹, You Seung Rim², Jeongsoo Hong¹ (1. Gachon University (Korea), 2. Sejong University (Korea))

FTS, GAZO, Trnasparent electrode

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