09:10 〜 09:30
[MEET1-1(Invited)] High Brightness Electron Beam with Carbon Nanotube (CNT) Cold Cathode
Carbon nanotube (CNT), Cold Cathode, high brightness
We fabricated high brightness electron beam with carbon nanotube (CNT) cold cathode. The beam brightness strongly depends on the virtual source size of CNT cold cathode. Based on the beam brightness simulation and measurement, we could obtain micro-focused electron beam with higher electron emission current for large area, high resolution imaging.