International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

09:50 〜 10:10

[MEET1-3] SOURCE 2D Simulation for High Resolution Carbon Nanotube Cold Cathode Fabrication

*Da Woon Kim1, Ha Rim Lee1, Boklae Cho2, Kyu Chang Park1 (1. University of Kyung Hee (Korea), 2. Korea Research Institute for Science and Standard (Korea))

Carbon Nanotube (CNT), High resolution, Beam divergence, Electron beam

https://doi.org/10.36463/idw.2019.1434

High-resolution electron microscopy requires an electron source with high brightness and resolution. We simulated and fabricated the carbon nanotube (CNT) cold cathode with high resolution. For the simulation, we used SOURCE 2D simulator and fabricated self-focused CNT based electron beam. The beam shows micron scale resolution with optimized self-focused CNT beam design. The beam spot size depends on the various parameters, such as depth, width and driving conditions.