Ellipsometry, XRR, and GCIB-TOF-SIMS Analysis of Small Molecule Layers in Solution Process and Vacuum Deposition Process

16:20 〜 16:40

[OLED2-4] Ellipsometry, XRR, and GCIB-TOF-SIMS Analysis of Small Molecule Layers in Solution Process and Vacuum Deposition Process

*Takahiro Shibamori¹, Sachiko Kojima¹, Aki Suzuki¹, Yusaku Tanahashi¹, Takashi Miyamoto¹ (1. Toray Research Center, Inc. (Japan))

solution process, deposition process, organic light emitting diodes, time-of-flight secondary ion mass spectrometry, gas cluster ion beam

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