OLED Micropatterning by Plasma Etch

JAEWAN CHO

doi:https://doi.org/10.36463/idw.2019.0930

10:40 〜 13:10

[OLEDp1-15L] OLED Micropatterning by Plasma Etch

*JAEWAN CHO¹ (1. SKKU (Korea))

Micropatterning, Plasma etch

https://doi.org/10.36463/idw.2019.0930

The micropatterning of OLED by plasma etch was investigated. The luminescence of patterned OLED micropixels was evaluated when the pixels were fabricated by photolithography and plasma etch.

Proceedings of the International Display Workshops Volume 26 (IDW '19)

[OLEDp1-15L] OLED Micropatterning by Plasma Etch