10:40 AM - 1:10 PM
[OLEDp1-7] A Study of Encapsulation Structure for TFT Reliability in Top Emission OLED Display
encapsulation, oxide, hydrogen, multilayer
Preventing hydrogen and water vapor from permeating through encapsulation layer plays an important role in TFT Reliability. To improve a blocking characteristic, encapsulation inorganic layers were studied. A SiNx and SiO2 multilayered inorganic deposition method for OLED has been developed to obtain a reliable performance.