Hydrogen-Treated Stable IGZO Thin-Film Transistor with All-Sputtered Gate Stack

16:10 〜 18:10

[AMDp1-2] Hydrogen-Treated Stable IGZO Thin-Film Transistor with All-Sputtered Gate Stack

*Taewon Seo¹, Juyoung Yun¹, Suwon Seong¹, Hyuk Park¹, Gilsu Jeon¹, Yoongyoung Chung¹ (1. Pohang University of Science and Technology(Korea))

IGZO TFT, hydrogen plasma, interface, stability

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