International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 27 (IDW '20)

Proceedings of the International Display Workshops Volume 27 (IDW '20)

2020年12月9日 〜 2020年12月11日
Virtual Conference

16:10 〜 18:10

[AMDp1-5L] Analysis of Transfer Characteristics of InGaZnO Thin Film Transistors

*Toshihiko Sakai1, Daisuke Matsuo1, Yoshitaka Setoguchi1, Yasunori Andoh1, Eiji Takahashi1, Toshiyuki Sameshima2 (1. Nissin Electric Co., Ltd.(Japan), 2. Tokyo University of Agriculture and Technology(Japan))

numerical calculation, IGZO TFT, fixed charge, free carrier density

https://doi.org/10.36463/idw.2020.0218

The analysis of transfer characteristics of InGaZnO thin-film transistors (IGZO TFTs) with a home-made-numerical calculation program presents information of the densities of defect, free carrier and fixed charge which are essentially useful for process evaluation.