International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 27 (IDW '20)

Proceedings of the International Display Workshops Volume 27 (IDW '20)

Dec 9, 2020 - Dec 11, 2020
Virtual Conference

5:30 PM - 5:50 PM

[FLX3-3] A Sacrificial Layer for Laser Lift-off of Colorless Polyimide

*Linshuang Li1, Chunge Yuan1, Kaijun Wang1, Zhuhui Li1, Li Zhang1, Qiao Huang1, Yushuang Wu1, Lijun Zhang1, Macai Lu 1, Nian Liu1, Minggang Liu1, Yanxi Ye2, Yong Fan1, Tsunglung Chang2, Dongze Li1, Xin Zhang2 (1. Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd., (China), 2. Shenzhen China Star Optoelectronics Technology Co., Ltd., (China))

Colorless polyimide, Laser lift-off, Sacrificial layer, Flexible display

https://doi.org/10.36463/idw.2020.0906

We experimentally studied the a-Si deposited by PECVD as the sacrificial layer (SCL) for the laser lift-off (LLO) of colorless polyimide (cPI). The results shows that colorless polyimide (cPI) with SCL layer after LLO exhibits lower yellow intensity, higher tensile strength, no curling and slighter laser damage.