International Display Workshops General Incorporated Association

5:20 PM - 5:40 PM

[FMC1-3] Single Crystallization Technology for Silicon Thin Films Transistor by Optical Fiber and Blue Laser Diode

*Junichi Kosugi1, Masahiro Kinoshita1, Seiya Toriyama1, Takayuki Kosuge1, Kaori Saito1, Takuya Sawai1, Yang YINGBAO1, Nobuo Sasaki1, Jun Gotoh1, Shigeto Sugimoto1 (1. V Technology Co., Ltd.(Japan))

Optical Fiber, Blue Laser Diode, Low-Temperature Poly-Si, TFT

https://doi.org/https://doi.org/10.36463/idw.2020.0236

We propose the single crystallization technology using optical rectangle core fiber and blue laser diode. This simple optical system which forms top-hat-shaped beam projected from the rectangle core can perform single crystallization of Si film by choosing appropriate core shape, optical power and exposure time.