5:20 PM - 5:40 PM
[FMC1-3] Single Crystallization Technology for Silicon Thin Films Transistor by Optical Fiber and Blue Laser Diode
Optical Fiber, Blue Laser Diode, Low-Temperature Poly-Si, TFT
We propose the single crystallization technology using optical rectangle core fiber and blue laser diode. This simple optical system which forms top-hat-shaped beam projected from the rectangle core can perform single crystallization of Si film by choosing appropriate core shape, optical power and exposure time.