4:10 PM - 6:10 PM
[FMCp3-1] Influence of Hollow Cathode Gradient Diffuser in PE-CVD for SiO2 on Performance and Reliability of IGZO TFTs
HCG diffuser, high mobility, stability
The hollow cathode gradient (HCG) diffuser has been testified to be advantageous for the preparation of high performance devicees by comparison with the normal hollow cathode effect(HCE) diffuser. The mobility of the device prepared under HCG diffuser condition is 11.3cm/V. PBTS and NBTIS results also showed good stability of the device.