16:10 〜 18:10
[FMCp3-3] The analysis and improvement of Lens Mura on G8.5 TFT LCD
Lens Mura, Exposure process, 3T pixel design, PR thickness
The Lens Mura's production mechanism was analyzed in detail, and an effective improvement method with low cost and strong practicability in the G8.5 TFT LCD production line was proposed. We increased HT thickness and lengthened ash time, the width of share TFT’s channel was increased, lens mura was less sensitive to process fluctuations, finally lens mura was improved.