16:10 〜 18:10

[FMCp3-7] Improvement of the Surface Roughness of LTPS Thin Films with Additional Laser Irradiation

*Fuminobu Hamano¹, Akira Mizutani¹, Kaname Imokawa¹, Daisuke Nakamura¹, Tetsuya Goto², Hiroshi Ikenoue¹ (1. Kyushu University(Japan), 2. Tohoku University(Japan))

Low-temperature poly-Si, Thin-film transistors, Excimer-laser annealing, Surface flattening

https://doi.org/10.36463/idw.2020.0322