International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 27 (IDW '20)

Proceedings of the International Display Workshops Volume 27 (IDW '20)

2020年12月9日 〜 2020年12月11日
Virtual Conference

09:50 〜 10:15

[INP1-3(Invited)] Flexible Image Sensor Array Using IGZO TFT Backplane Technology for X-ray Detector

*Rikiya Takita1, Wataru Nakamura1, Akinori Kubota1, Fumiki Nakano1, Kazuhide Tomiyasu1, Yu Nakamura1, Naoki Makita1 (1. Sharp Corporation (Japan))

Photo diode, Flexible X-ray sensor array, IGZO TFT

https://doi.org/10.36463/idw.2020.0921

A flexible X-ray sensor array using IGZO-TFT was prototyped. IGZO-TFT shows faster read-out speed compared to amorphous silicon TFT. So IGZO-TFT yield dynamic motion detectors. In addition, flexible substrate realizes light-weight and robust detector. In this paper we evaluated the IGZO-TFT flexible sensor array and it showed good characteristics.