International Display Workshops General Incorporated Association

15:40 〜 16:00

[FMC2-2(Invited)] Feasibility of Low-Cost Micro-LED Manufacturing with Sputtering

*Hiroshi Fujioka1、Kohei Ueno1、Atsushi Kobayashi1 (1.The University of Tokyo (Japan))

InGaN LEDs, micro-LEDdisplays, sputtering, RGB LEDs, tunneling contacts

https://doi.org/10.36463/idw.2021.0213

We have fabricated RGB InGaN LEDs on low cost substrate such as glass or metal foils by sputtering to investigate the feasibility of Low-Cost Micro-LED Manufacturing. We have also fabricated cascade LED structures with the use of p+n+ tunneling contacts to simplify the fabrication process of micro-LED displays.