3:40 PM - 4:00 PM
[FMC2-2(Invited)] Feasibility of Low-Cost Micro-LED Manufacturing with Sputtering
InGaN LEDs, micro-LEDdisplays, sputtering, RGB LEDs, tunneling contacts
We have fabricated RGB InGaN LEDs on low cost substrate such as glass or metal foils by sputtering to investigate the feasibility of Low-Cost Micro-LED Manufacturing. We have also fabricated cascade LED structures with the use of p+n+ tunneling contacts to simplify the fabrication process of micro-LED displays.