[FMCp1-9L] Near Infrared Photolithography and its Photoresist
Near IR, Infrared, Photolithography, Photoresist, Black Photoresist
Novel photolithography using NIR (Near Infrared) exposure and its photoresist are developed. Using NIR’s extreme high transparency to photoresist polymer layer, photoresist with very high photosensitivity and vertical profile can be achieved. Adding organic black pigment that blocks UV/Visible light but is transparent to NIR, a black photoresist with vertical profile and high film thickness can be made.