International Display Workshops General Incorporated Association

15:30 〜 15:50

[INP2-3(Invited)] Haptic MEMS

*Takeshi Kobayashi1、Toshihiro Takeshita1 (1.National Institute of Advanced Industrial Science and Technology (AIST) (Japan))

MEMS, Piezoelectric, Haptics

https://doi.org/10.36463/idw.2021.0982

We have developed a novel “Haptic MEMS” devices, in which ultra-thin PZT/Si actuator array is integrated on flexible substrate. The haptic MEMS can express spatial tactile sensation with the distribution of vibration stimuli. In the present study, haptic MEMS with ultra-thin PZT/Si actuator array is demonstrated.