International Display Workshops General Incorporated Association

15:20 〜 15:40

[INP5-1(Invited)] Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More

*Rihito Kuroda1、Yuki Sugama1、Yoshiaki Watanabe1、Tetsuya Goto1、Toshiro Yasuda2、Shinichi Murakami2、Hiroshi Hamori2、Shigetoshi Sugawa2 (1.Tohoku University (Japan)、2.OHT (Japan))

Proximity capacitance, Image sensor, Noise reduction, Inspection, Authentification

https://doi.org/10.36463/idw.2021.1003

This paper presents CMOS proximity capacitance image sensors achieving 0.1aF detection accuracy with high spatial resolution with real-time imaging capability and the applications thereof. Key technologies related to imaging apparatus and noise reduction, image sensor evolution in terms of pixel size shrinkage and pixel number increase, and examples of applications are to be demonstrated.