Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More

Rihito Kuroda, Yuki Sugama, Yoshiaki Watanabe, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Hiroshi Hamori, Shigetoshi Sugawa

doi:https://doi.org/10.36463/idw.2021.1003

3:20 PM - 3:40 PM

[INP5-1(Invited)] Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More

*Rihito Kuroda¹, Yuki Sugama¹, Yoshiaki Watanabe¹, Tetsuya Goto¹, Toshiro Yasuda², Shinichi Murakami², Hiroshi Hamori², Shigetoshi Sugawa² (1.Tohoku University (Japan), 2.OHT (Japan))

Proximity capacitance, Image sensor, Noise reduction, Inspection, Authentification

https://doi.org/10.36463/idw.2021.1003

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Proceedings of the International Display Workshops Volume 28 (IDW '21)

[INP5-1(Invited)] Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More

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