Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More

Rihito Kuroda, Yuki Sugama, Yoshiaki Watanabe, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Hiroshi Hamori, Shigetoshi Sugawa

doi:https://doi.org/10.36463/idw.2021.1003

3:20 PM - 3:40 PM

[INP5-1(Invited)] Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More

*Rihito Kuroda¹, Yuki Sugama¹, Yoshiaki Watanabe¹, Tetsuya Goto¹, Toshiro Yasuda², Shinichi Murakami², Hiroshi Hamori², Shigetoshi Sugawa² (1.Tohoku University (Japan), 2.OHT (Japan))

Proximity capacitance, Image sensor, Noise reduction, Inspection, Authentification

https://doi.org/10.36463/idw.2021.1003

This paper presents CMOS proximity capacitance image sensors achieving 0.1aF detection accuracy with high spatial resolution with real-time imaging capability and the applications thereof. Key technologies related to imaging apparatus and noise reduction, image sensor evolution in terms of pixel size shrinkage and pixel number increase, and examples of applications are to be demonstrated.

Proceedings of the International Display Workshops Volume 28 (IDW '21)

[INP5-1(Invited)] Sub-aF Detection Accuracy CMOS Proximity Capacitance Image Sensors for Inspection, Authentification and More