Carbon-Nanotube Based Cold Cathode Electron Beam (C-beam) for Lithography Application

5:50 PM - 6:10 PM

[MEET8-3(Invited)] Carbon-Nanotube Based Cold Cathode Electron Beam (C-beam) for Lithography Application

*Kyu Chang Park¹, Sung Tae Yoo¹ (1.Kyung Hee University (Korea))

Carbon Nanotube, Electron emission, Ultraviolet, Lighting

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