ZnON Thin Film and Its Impact on the IGZO Phototransistor

Yuseong Jang, Kyeong Soo Kang, Soo-Yeon Lee

doi:https://doi.org/10.36463/idw.2022.0139

5:00 PM - 5:20 PM

[AMD3-2] ZnON Thin Film and Its Impact on the IGZO Phototransistor

*Yuseong Jang¹, Kyeong Soo Kang¹, Soo-Yeon Lee¹ (1.Seoul National University (Korea))

ZnON, Metal oxynitride, Reactive sputtering, InGaZnO (IGZO), Phototransistor

https://doi.org/10.36463/idw.2022.0139

We fabricated IGZO/ZnON phototransistor by adopting in-situ deposition of IGZO and ZnON thin films. ZnON thin film, deposited using ZnO ceramic target, successfully enhanced the recombination of V_O²⁺ states in IGZO so that negligible persistent photoconductivity (PPC) effect was achieved.

Proceedings of the International Display Workshops Volume 29 (IDW '22)

[AMD3-2] ZnON Thin Film and Its Impact on the IGZO Phototransistor