International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

2022年12月14日 〜 2022年12月16日
Fukuoka International Congress Center

17:00 〜 17:20

[AMD3-2] ZnON Thin Film and Its Impact on the IGZO Phototransistor

*Yuseong Jang1、Kyeong Soo Kang1、Soo-Yeon Lee1 (1.Seoul National University (Korea))

ZnON, Metal oxynitride, Reactive sputtering, InGaZnO (IGZO), Phototransistor

https://doi.org/10.36463/idw.2022.0139

We fabricated IGZO/ZnON phototransistor by adopting in-situ deposition of IGZO and ZnON thin films. ZnON thin film, deposited using ZnO ceramic target, successfully enhanced the recombination of VO2+ states in IGZO so that negligible persistent photoconductivity (PPC) effect was achieved.