Layer Reduction of Hybrid TFT Towards 6.6 inch AMOLED Mass Production

Shunsuke Kobayashi, Yujiro Takeda, Masatomo Honjyo, Mehadi Aman, Kenichi Kitoh, Kazuatsu Ito, Kohei Tanaka, Hiroshi Matsukizono

doi:https://doi.org/10.36463/idw.2022.0191

1:50 PM - 2:10 PM

[AMD7-2 (Invited)] Layer Reduction of Hybrid TFT Towards 6.6 inch AMOLED Mass Production

*Shunsuke Kobayashi¹, Yujiro Takeda¹, Masatomo Honjyo¹, Mehadi Aman¹, Kenichi Kitoh¹, Kazuatsu Ito¹, Kohei Tanaka¹, Hiroshi Matsukizono¹ (1.Sharp Display Technology Corporation (Japan))

IGZO, LTPO, OLED, reliability, low power consumption

https://doi.org/10.36463/idw.2022.0191

We have successfully implemented a novel process to reduce a metal and a dielectric layer of hybrid TFT. A process to reduce the Mo residue from the back channel of IGZO surface was also optimized. 6.6 inch AMOLED panels for smartphone with this new hybrid TFT process have been adopted for mass production.

Proceedings of the International Display Workshops Volume 29 (IDW '22)

[AMD7-2 (Invited)] Layer Reduction of Hybrid TFT Towards 6.6 inch AMOLED Mass Production