International Display Workshops General Incorporated Association

13:50 〜 14:10

[AMD7-2 (Invited)] Layer Reduction of Hybrid TFT Towards 6.6 inch AMOLED Mass Production

*Shunsuke Kobayashi1、Yujiro Takeda1、Masatomo Honjyo1、Mehadi Aman1、Kenichi Kitoh1、Kazuatsu Ito1、Kohei Tanaka1、Hiroshi Matsukizono1 (1.Sharp Display Technology Corporation (Japan))

IGZO, LTPO, OLED, reliability, low power consumption

https://doi.org/10.36463/idw.2022.0191

We have successfully implemented a novel process to reduce a metal and a dielectric layer of hybrid TFT. A process to reduce the Mo residue from the back channel of IGZO surface was also optimized. 6.6 inch AMOLED panels for smartphone with this new hybrid TFT process have been adopted for mass production.