13:50 〜 14:10
[AMD7-2 (Invited)] Layer Reduction of Hybrid TFT Towards 6.6 inch AMOLED Mass Production
IGZO, LTPO, OLED, reliability, low power consumption
We have successfully implemented a novel process to reduce a metal and a dielectric layer of hybrid TFT. A process to reduce the Mo residue from the back channel of IGZO surface was also optimized. 6.6 inch AMOLED panels for smartphone with this new hybrid TFT process have been adopted for mass production.