International Display Workshops General Incorporated Association

[AMDp1-4] Improvement of Electrical Performance of Te/TeO Thin Film Transistors Using Sputtering at Room Temperature

*Seung Min Lee1、Seong Cheol Jang1、Hyun-Suk Kim1 (1.Chungnam National University (Korea))

CMOS, Tellurium, Tellurium Oxide, thin film transistor, Bilayer

https://doi.org/10.36463/idw.2022.0210

Te transistors have high electric performance