International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

2022年12月14日 〜 2022年12月16日
Fukuoka International Congress Center

[AMDp2-5] A Novel TFT Architecture for Application to Mini-LED and Micro-LED Display

*Chuanbao Luo2、Jiangbo Yao1,2、Wei Ding3、Xiujuan Xian3、Kai Zhou3、Junbiao Peng1、Xin Zhang2 (1. Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology (China)、2.TCL China Star Optoelectronics Display Technology Co. Ltd (China)、3.Shenzhen China Star Optoelectronics Semiconductor Display Technology Co. Ltd (China))

Oxide TFT, Bridging layer, Low cost, Self-aligned

https://doi.org/10.36463/idw.2022.0245

In this paper, 5-mask-count array process using light shield layer acted as source and drain layer, which is the first layer on the glass substrate, is studied. The device mobility and the threshold voltage is 13.3 cm2/Vs and 0.20V, respectively, which is reached to the considerable level of conventional top-gate self-aligned device.