International Display Workshops General Incorporated Association

[DXRp1-5] Prototype and Demonstration of an X-ray FPD Fabricated Using Scalable Mounting Technology

*Akifumi Koike1、Takaharu Okunoyama1、Tsuyoshi Terao1、Katsuyuki Takagi1,2、Junichi Nishizawa1,2、Toshiyuki Takagi1,2、Kohei Toyoda1,2、Hidenori Mimura2,1、Toru Aoki2,1 (1.ANSeeN Inc. (Japan)、2.Shizuoka University (Japan))

X-ray Flat Panel Detector, Cd(Zn)Te, Photon Counging, Direct conversion

https://doi.org/10.36463/idw.2022.1169

A direct conversion photon counting X-ray imaging system with a hybrid structure of CdTe and TSV processing readout circuit was developed and demonstrated X-ray imaging with 3x3 FPD prototype. Size scalable mounting structure was developed with 4-sided batteable sensor modules.