International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

2022年12月14日 〜 2022年12月16日
Fukuoka International Congress Center

17:00 〜 17:20

[FLX1-2 (Invited)] Single Crystalline Silicon CMOSFETs on Plastic and Their Application to Highly Sensitive Virus Detection System

*Seiichiro Higashi1、Rikiya Sumichika1、Toru Suehiro1、Hiroaki Hanafusa1、Yoshiko Okamura1 (1.Hiroshima University (Japan))

Flexible electronics, Silicon CMOS, Virus detection device

https://doi.org/10.36463/idw.2022.1045

Formation of single-crystalline silicon CMOSFETs on PET has been achieved by meniscus force mediated layer transfer (MLT) with a high yield of 99.97% and N-channel transistors show typical mobility of 529cm2V-1s-1. A novel application of MLT technology to a virus detection device based on micro-chamber matrix is addressed.