International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14, 2022 - Dec 16, 2022
Fukuoka International Congress Center

5:00 PM - 5:20 PM

[FLX1-2 (Invited)] Single Crystalline Silicon CMOSFETs on Plastic and Their Application to Highly Sensitive Virus Detection System

*Seiichiro Higashi1, Rikiya Sumichika1, Toru Suehiro1, Hiroaki Hanafusa1, Yoshiko Okamura1 (1.Hiroshima University (Japan))

Flexible electronics, Silicon CMOS, Virus detection device

https://doi.org/10.36463/idw.2022.1045

Formation of single-crystalline silicon CMOSFETs on PET has been achieved by meniscus force mediated layer transfer (MLT) with a high yield of 99.97% and N-channel transistors show typical mobility of 529cm2V-1s-1. A novel application of MLT technology to a virus detection device based on micro-chamber matrix is addressed.