15:50 〜 16:10
[FLX2-4L (Invited)] New Structure of High Current Driving Oxide TFT for Ultra-High Resolution Display
Trench TFT, high current driving, ultra-high resolution
We introduce new structure of oxide TFT providing high current in a small footprint and suitable for the flexible display. Introduction of trench within the channel results in the thickness difference of semiconductors in the vertical and lateral regions. While the thicker lateral region of oxide semiconductor plays as a high current path, thin two vertical channels function as the semiconductors to yield acceptable Von with...