2:30 PM - 2:50 PM
[FLX5-4] Solution-Processed Ultrahigh PHPS Gas Barriers with Glass-like Performance
water vapor barrier films, solution processes, perhydropolysilazanes, vacuum UV, organic light-emitting diodes
We report all-solution-processed gas barriers using perhydropolysilazane (PHPS)-derived SiN films densified by vacuum ultraviolet (VUV) irradiation in a nitrogen atmosphere. The appropriate PDSN thickness and irradiated VUV dose afford an excellent WVTR of 4.8x10-5 g m-2 day-1, which makes it one of the best-performing water vapor barriers recorded to date.