International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

2022年12月14日 〜 2022年12月16日
Fukuoka International Congress Center

15:10 〜 15:30

[FMC5-2] Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode

*Yingbao Yang1、Seiya Toriyama1、Masahiro Kinoshita1、Kaoru Saito1、Takuya Sawai1、Junichi Koshigi1、Jun Gotoh1、Shigeto Sugimoto1、Jingbao Yao、Rui Zhao、Jinming Li、Shouqing Chen (1.V Technology Co., Ltd (Japan))

Blaue Laser Diode, BLDA, Optical Fiber, Lateral-Growth , Single Crystal

https://doi.org/10.36463/idw.2022.0287

A new silicon-crystallization-annealing system using blue laser diode (BLDA) has been developed. By a redundant fiber-array arrangement, annealing of different pixel pitch can be implemented. Low off current and high mobility about 300cm2/VS has been confirmed in the TFT device by BLDA.