International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14, 2022 - Dec 16, 2022
Fukuoka International Congress Center

3:10 PM - 3:30 PM

[FMC5-2] Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode

*Yingbao Yang1, Seiya Toriyama1, Masahiro Kinoshita1, Kaoru Saito1, Takuya Sawai1, Junichi Koshigi1, Jun Gotoh1, Shigeto Sugimoto1, Jingbao Yao, Rui Zhao, Jinming Li, Shouqing Chen (1.V Technology Co., Ltd (Japan))

Blaue Laser Diode, BLDA, Optical Fiber, Lateral-Growth , Single Crystal

https://doi.org/10.36463/idw.2022.0287

A new silicon-crystallization-annealing system using blue laser diode (BLDA) has been developed. By a redundant fiber-array arrangement, annealing of different pixel pitch can be implemented. Low off current and high mobility about 300cm2/VS has been confirmed in the TFT device by BLDA.