Metal-assisted Direct Growth of CVD Graphene on GaN as Transparent Electrodes

Penghao Tang, Fangzhu Xiong, Zaifa Du, Kai Li, Yu Mei, Weiling Guo, Qun Yan, Jie Sun

doi:https://doi.org/10.36463/idw.2022.0868

3:50 PM - 4:10 PM

[MEET2-4 (Invited)] Metal-assisted Direct Growth of CVD Graphene on GaN as Transparent Electrodes

Penghao Tang¹, Fangzhu Xiong¹, Zaifa Du¹, Kai Li¹, Yu Mei¹, Weiling Guo¹, Qun Yan², *Jie Sun^1,2 (1.Beijing University of Technology (China), 2.Fuzhou University (China))

graphene, LED, GaN, transparent electrode

https://doi.org/10.36463/idw.2022.0868

This paper reports a metal assisted process for the direct growth of CVD graphene on GaN LED epiwafers. The metal layer was introduced as both the mask and catalyst, which was subsequently removed in a penetration etching process. This provides a solution for the integration of graphene and GaN devices.

Proceedings of the International Display Workshops Volume 29 (IDW '22)

[MEET2-4 (Invited)] Metal-assisted Direct Growth of CVD Graphene on GaN as Transparent Electrodes