International Display Workshops General Incorporated Association

10:50 〜 11:10

[MEET9-1 (Invited)] Case Studies in MicroLED End-to-End Process Control

*John C. Robinson1、Bobby Barnett1 (1.KLA Corporation (United States of America))

MicroLED, Release etch, Mass transfer, Metrology, Process control

https://doi.org/10.36463/idw.2022.0945

MicroLED displays offer many technical benefits, however, cost remains a barrier to wide market acceptance. Improved yield through process control provides a pathway to high volume manufacturability and lower costs. We discuss end-to-end process control and case studies on release etch for microLEDs and metrology of devices after mass transfer.