[PHp2-1L] Evaluation of Inner Phase of ZnAl2O4 Thin Film for Ultra Violet Emission
Zinc aluminate thin film, UV emission, Cathodoluminescence, Electron beam penetration depth
Inner phase of ZnAl2O4 deep UV phosphor thin films were investigated by etching. It was found that multiple ZnAl2O4 phases were formed. From the film thickness where UV emission decreased sharply, the emission peak shifted to the shorter side, it was clarified that the range of Zn distribution.