[AMDp2-2] An Empirical Analysis on Dimension Dependent Characteristics of Low Temperature Poly-Si Thin Film Transistors
Blue laser Annealing, Low-temperature polysilicon, Dimension dependency, Levinson Plot, Grain boundary trap states
This research exemplifies the significance of grain boundary trap states in Blue Laser Annealed-Low temperature polysilicon (BLA-LTPS) Thin Film Transistors (TFTs) which yield the device dimension-dependent characteristics. The underlying mechanisms were analyzed by extracting grain boundary trap densities using Levinson's plot.