International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 30 (IDW '23)

Proceedings of the International Display Workshops Volume 30 (IDW '23)

Dec 6, 2023 - Dec 8, 2023
TOKI MESSE Niigata Convention Center

[AMDp2-8L] Development of High Mobility and Reliability Metal Oxide TFT

*Guowen Yan1, Dejian Wang1, Lidong Ding2, Lin Xu2, Xiaoqi Sun2, Fa-Hsyang Chen2, Xiang Liu3, Rubo Xing2, Junfeng Li2 (1. Hefei Visionox Technology Co., Ltd. (China), 2. Kunshan Govisionox Optoelectronics Co., Ltd. (China), 3. Yungu (Gu'an) Technology Co., Ltd. (China))

Metal Oxide, TFT, High mobility

https://doi.org/10.36463/idw.2023.0298

The high mobility TFTs of novel metal oxide were developed, the device shows high mobility ∼33cm2/Vs with Vth of 0.16V. The high mobility TFT has small Vth variation with channel length 3.5um on Gen. 6 glass, also shows small Vth shift under positive/negative bias temperature stress.