[AMDp2-10L] Four-Terminal Poly-Si Vertical TFTs on Glass Substrates
TFT, vertical TFT, poly-Si, four terminals
We fabricated n-ch four-terminals poly-Si vertical TFTs (4T VTFTs) on a glass substrate. The 4T VTFTs have a poly-Si crystallized by metal-induced crystallization. A double gate drive showed a superior on/off ratio and small s.s. compared with those of a single gate drive. In addition, we succeed in 4T operation.