International Display Workshops General Incorporated Association

[AMDp2-10L] Four-Terminal Poly-Si Vertical TFTs on Glass Substrates

*Kosei Suzuki1, Kotaro Kusunoki1, Akito Hara1 (1. Tohoku Gakuin University (Japan))

TFT, vertical TFT, poly-Si, four terminals

https://doi.org/10.36463/idw.2023.0305

We fabricated n-ch four-terminals poly-Si vertical TFTs (4T VTFTs) on a glass substrate. The 4T VTFTs have a poly-Si crystallized by metal-induced crystallization. A double gate drive showed a superior on/off ratio and small s.s. compared with those of a single gate drive. In addition, we succeed in 4T operation.