[AMDp2-11L] The Effect of Poly Silicon Surface Roughness Reduction on LTPS Devices Applied to Flexible Displays
Poly Silicon films, Boundary, LTPS, Electrical performance
Low-temperature polycrystalline silicon(LTPS) devices can be used as core components of pixel drive circuits for active matrix organic light-emitting displays (AMOLEDs), Polycrystalline silicon(P-Si) film and device performance directly affect the display performance.In this paper, we optimize the ELA process and the thin film deposition process, develop ELA double scan to achieve the reduction of P-Si grain boundary height on polyimide substrates, and ...