11:10 〜 11:30
[FLX5-2] Improvement of Foldable Polarizer Reliability by Optimizing TOE Process
Foldable Polarizer, TOE SiNx layer, Reliability, Discoloration
Different foldable modules were fabricated and foldable polarizer's performance was evaluated. During RA test, chemical reactions occurred between I3-/I5- ions from polarizer and NH4+ ions from touch panel on encapsulation (TOE), resulting in discoloration of the foldable polarizer. To enhance foldable polarizer's reliability, NH3: SiH4 gas flow rate was adjusted.