LED Illumination System Used in FPD Exposure Tools

Kazuki Toyoda

doi:https://doi.org/10.36463/idw.2023.0433

[FMCp2-5] LED Illumination System Used in FPD Exposure Tools

*Kazuki Toyoda¹, Kentaro Hiruma¹, Daisuke Yasunaga¹, Kazuyuki Kasumi¹, Takayuki Hashimoto¹, Katsutoshi Usui¹, Ryosuke Fukuoka¹, Manabu Hakko¹, Keijiro Imai¹, Takaaki Terashi¹, Yoshinori Osaki¹ (1. Canon (Japan))

Lithography, FPD, LED, UV

https://doi.org/10.36463/idw.2023.0433

We developed illumination system using light emitting diode (LED) for flat panel display (FPD) exposure tools. The system can be used on Canon's FPD exposure tools by replacing some parts of its illumination system. Our new system improves productivity of FPD manufacturing.

Proceedings of the International Display Workshops Volume 30 (IDW '23)

[FMCp2-5] LED Illumination System Used in FPD Exposure Tools