Fabrication and Demonstration of VGA Format Microbolometer FPAs using Semi-Conducting SWCNT Networks for Uncooled LWIR Image Sensor

Tomo Tanaka

doi:https://doi.org/10.36463/idw.2023.1457

3:20 PM - 4:00 PM

[IST2-1 (Invited)] Fabrication and Demonstration of VGA Format Microbolometer FPAs using Semi-Conducting SWCNT Networks for Uncooled LWIR Image Sensor

*Tomo Tanaka^1,2, Masahiko Sano¹, Masataka Noguchi^1,2, Takashi Miyazaki^1,2, Megumi Kanaori², Toshie Miyamoto^1,2, Naoki Oda¹, Ryota Yuge^1,2 (1. NEC Corporation (Japan), 2. AIST (Japan))

Infrared detectors, Focal plane arrays, Carbon nanotubes, Microbolometers

https://doi.org/10.36463/idw.2023.1457

We fabricated VGA format microbolometer focal plane allays of 640 × 480 pixels with semi-conducting single walled carbon nanotubes (SWCNT) as detection materials. The responsivity of them in LWIR region showed about 10⁵ V/W, respectively. We expect that the high-purity semi-conducting SWCNT networks effectively work for higher responsivity of microbolometer.

Proceedings of the International Display Workshops Volume 30 (IDW '23)

[IST2-1 (Invited)] Fabrication and Demonstration of VGA Format Microbolometer FPAs using Semi-Conducting SWCNT Networks for Uncooled LWIR Image Sensor