A Preliminary Demonstration of High Resolution Proximity Capacitance-Optical Multimodal CMOS Image Sensor

Tsubasa Nozaki

doi:https://doi.org/10.36463/idw.2023.1471

18:10 〜 18:30

[IST3-3] A Preliminary Demonstration of High Resolution Proximity Capacitance-Optical Multimodal CMOS Image Sensor

*Tsubasa Nozaki¹, Yoshiaki Watanabe¹, Chia-Chi Kuo¹, Koga Saito¹, Takezo Mawaki¹, Rihito Kuroda¹ (1. Tohoku University (Japan))

Proximity capacitance, Image sensor, Multimodal, Optical

https://doi.org/10.36463/idw.2023.1471

This paper presents a preliminary demonstration of the proximity capacitance-optical multimodal imaging using a 2.8 µm-pitch 1.8M pixels CMOS image sensor. The experimental results showcase the high accuracy capacitance imaging, the good functionality of optical imaging, and the high spatial resolution, validating the feasibility of the multimodal imaging principle.

Proceedings of the International Display Workshops Volume 30 (IDW '23)

[IST3-3] A Preliminary Demonstration of High Resolution Proximity Capacitance-Optical Multimodal CMOS Image Sensor