International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 30 (IDW '23)

Proceedings of the International Display Workshops Volume 30 (IDW '23)

2023年12月6日 〜 2023年12月8日
TOKI MESSE Niigata Convention Center

11:30 〜 11:50

[MEET10-3 (Invited)] Oxide Thin-Film Transistors toward Monolithic 3-D Integration for CMOS IC and Micro-LED Display Applications

*Na Xiao1, Saravanan Yuvaraja1, Zhiyuan Liu1, Xiaohang Li1 (1. King Abdullah University of Science and Technology (Saudi Arabia))

oxide thin-film transistor, monolithic 3-D integration, indium oxide, high-mobility

https://doi.org/10.36463/idw.2023.1012

In this work, we demonstrated high-mobility (μFE ∼100 cm2/V·s) indium oxide (In2O3) thin-film transistors (TFTs) with aluminum oxide (Al2O3) as passivation layer (PVL) using radio frequency (RF) magnetron sputtering. These high performance passivated In2O3 TFTs exhibit great prospects for realizing monolithic 3D-integration for CMOS ...