11:50 〜 12:10
[MEET10-4L (Invited)] Advanced Epitaxy for Vertical Stack R/G/B Micro-LED Pixel Fabrication
remote epitaxy, micro-LEDs, vertical pixel
We present the fabrication of high-density vertical R/G/B micro-LED architectures using remote and van der Waals epitaxy. This method allows easy mechanical delamination followed by stacking epi-layers to be exquisitely architected by photolithography. This signifies a promising solution for precise LED alignment in ultra-high-resolution displays, such as AR and XR.