Fabrication of (Zn,Mg)O Thin Films Dispersed with ZnO Nanocrystals by Mist CVD for Phosphor Applications

Kyosuke Tanaka

doi:https://doi.org/10.36463/idw.2023.0537

[PHp1-3L] Fabrication of (Zn,Mg)O Thin Films Dispersed with ZnO Nanocrystals by Mist CVD for Phosphor Applications

*Kyosuke Tanaka¹, Takeshi Okutsu¹, Toshihiro Nara¹, Tsukasa Yagasaki¹, Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara¹ (1. Shizuoka University (Japan))

(Zn,Mg)O, Mist CVD, thin films, nanocrystal, luminescence

https://doi.org/10.36463/idw.2023.0537

(Zn,Mg)O thin films dispersed with ZnO nanocrystals (NCs) were fabricated on a-plane sapphire substrates at 650 °C by a one-step process using mist chemical vapor deposition. The sample exhibited cathodoluminescence originating from ZnO NCs. The post-annealing treatment at 850 °C enhanced the emission from ZnO NCs.

Proceedings of the International Display Workshops Volume 30 (IDW '23)

[PHp1-3L] Fabrication of (Zn,Mg)O Thin Films Dispersed with ZnO Nanocrystals by Mist CVD for Phosphor Applications